Teijin’s proprietary “Island and Sea Splitting Fiber Technology” is utilized to apply ultra fine fiber manufacturing techniques at 200nm, 400nm, and 700nm to liquid filter cartridges.

Produced through wet laid papermaking, we uniformly disperse short cut ultra fine fibers (200nm, 400nm, 700nm) in water. This method creates an exceptionally thin filter with fine, sharp pores, contrasting with the meltblown process. Fibers are thermally bonded without the use of adhesives.

Varied fiber diameter and blend ratio in the combination of nanofibers and microfibers enable precise pore size control, creating a high-porosity filter material.

No clogging with

• Highly Concentrated Dust
• Gelatinous Materials
• High Viscosity Materia

Utilizing uniformly sized ultra fine fibers in high concentration results in Capturing low-concentration (ppm-level) foreign particles.

Long life with

• High filtration precision due to a sharp pore size distribution
• High flow rates enabled by low thickness and curvature

Filtering High-Concentration Slurry always faces challenges arising from insufficient porosity and a lack of filtration precision, leading to issues such as clogging and a reduced lifespan.

The proposed solution involves implementing a groundbreaking filter designed to effectively eliminate coarse particles ranging from several hundred nanometers to as small as several tens of nanometers in slurries.

Fluid Filtration

• CMP Slurry
• Polymer
• Solvent

▶Our Solution

Dual Structure, combining “PRE FILTRATION (DEPTH TYPE)” and “FINAL FILTRATOION (PLEATED TYPE)”, optimizes the filtration of high-concentration slurry.

■Dual Structure cartridge filter

■Filtration Performance

	Capture 0.45µm particle	Capture 0.20µm particle
PET 0.45µm	97%	—
PET 0.30µm	97%	50%
PVDF Membran 0.22µm	97%	60%
Conventional 0.45µm	97%	10%
Conventional 0.20µm	97%	15%

【Testing Condition】
Material: Silica, Filter Size: 47mmφ, Pressure: Decompression 0.072Mpa, Test Drive: Liquid particle counter

■The removal performance of coarse particles

“Lasts double the lifespan of the membrane”

“The peak on the coarse particle side disappears after filtration”

Filter designed for the removal of undissolved particles and gelatinous impurities generated during the manufacturing of chemical substances.

Water-based emulsions

• Binder for batteries
• Adhesives
• Color filter ink

By stacking filter media with a gradual pore size/pore space gradient, achieving high collection efficiency and long lifespan is possible. Additionally, it results in low-pressure loss during filtration, preventing the push-out.

A groundbreaking filter incorporating a stacked arrangement of filter media with a gradual variation in pore size achieves high collection efficiency and prolonged lifespan. It ensures low-pressure drop filtration and prevents push-through phenomena (passage of foreign particles).

A smooth transition in pore size or gaps greatly improves the effectiveness of filtering gel-like substances and tiny particles.

■Filtration Performance

For gelatinous materials and small particle,

“Extend the cycle of filter replacement”

Testing Condition

• Untreated Water: Gel Solution / Methylcellulose 500ppm, Powder / AC Fine Dust 100ppm
• Dispersing Medium: Water
• Cartridge Size: 250mm
• Flow Rate: 10L/min
• Test Drive: Liquid Particle Counter

“As soon as installed, achieves higher dust collection efficiency”

Suitable for filtering resist liquids and etching solutions used in the semiconductor processing lithography.

The challenges of metal adsorption filtration include the removal of particles, bubbles, and metallic contaminants that can cause surface defects in resist patterns. The elimination of metal contamination is crucial to prevent electrical performance issues, requiring reduction to ppb levels. High metal ion adsorption performance is essential for effective filtration.

Through our specialized cleaning techniques, a high-purity nylon filter media with extremely low levels of metallic and organic impurities can be achieved. The surface of the nylon filter media contains a minimal amount of adsorbed water, exhibiting a significant negative charge (zeta potential). This strong negative charge is expected to enhance the adsorption effect for positively charged species such as metal ions and proteins).

Maintains higher Zeta potential to prevent aggregation, sedimentation, and flocculation

Flow Characteristics

• Liquid: Purified Water
• Length: 250mm

Filtration Efficiency

• Liquid: Purified Water
• Length: 250mm
• Flow Rate: 10L/min
• Particle: ACFTD

■Special cleaning technology achieves extremely low levels of metals and organic contaminants

Metal Leaching Amount

• Extraction Condition: Soaking one 10-inch cartridge filter in 1.8 liters of ultrapure water
• Measurement method: After immersing for 24 hours at room temperature, collect ultrapure water for ICP analysis

Amount of IPA (Isopropyl Alcohol) leachate (organic compounds)

• Extraction Condition: Soaking a 500 cm2 filter sheet in 300 mL of isopropyl alcohol at 20°C for 24 hours
• Measurement method: Measure the weight of the residue after evaporating the solvent

Sample	Metal Leaching Amount (mg/m2)
Low-extractable nylon cartridge filter	76

【Testing Condition】
Tested Filter :TNN005 Material: Nylon6 Cage Material:Polyethylene Filtration Efficiency: 0.5μ